New calibration grating

We would like to introduce new Calibration Grating TGL1 for 2-D and 3-D calibration with three different X/Y periods - 6um,10um, 20um. 
Step height 168nm.

Each grating has 9 different parts with 3 different structures - lineas, pillars and circles.

Detailed information, please, read on the prodjuct page: TGL1